Design, optimisation and predicted performance of a micro-machined IR sensor that exploits the squeeze film damping effect to measure cantilever beam displacement期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Design, optimisation and predicted performance of a micro-machined IR sensor that exploits the squeeze film damping effect to measure cantilever beam displacement

Authors:	P.D. Smith C.R. Chatwin R.C.D. Young

Affiliation:	^aSchool of Science and Technology, University of Sussex, Falmer, Brighton, BN1 9QT, UK

Abstract:

Keywords:	MEMS Infrared Squeeze-film damping Micro-structure
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