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圆柱形介质阻挡放电等离子体光谱诊断
引用本文:马柳,时家明,袁忠才,张玮. 圆柱形介质阻挡放电等离子体光谱诊断[J]. 光散射学报, 2008, 20(3)
作者姓名:马柳  时家明  袁忠才  张玮
作者单位:电子工程学院安徽省红外与低温等离子体重点实验室,合肥,230037
基金项目:教育部跨世纪优秀人才培养计划
摘    要:在350~1150 nm范围内对开放空间Ar气介质阻挡放电等离子体的发射光谱进行测量,表明Ar发射谱线主要集中在680 nm~950 nm,且都为Ar原子谱线。采用发射光谱相对强度对比法,选取相距较近且有相同下能级的727.29 nm(2P2-1S4),738.40 nm(2P3-1S4)和751.47 nm(2P5-1S4)三条光谱测量电子温度。通过对在Ar气和空气中放电谱线的对比和分析,得出发射光谱相对强度与电源功率的关系。最终得出若要便于工业应用和光谱测量,需要选择特定的气体流量和电源功率。

关 键 词:介质阻挡放电  等离子体  光谱诊断  发射谱线

Spectral Diagnosis of Cylinder Dielectric Barrier Discharge Plasma
MA Liu,SHI Jia-ming,YUAN Zhong-cai,ZHANG Wei. Spectral Diagnosis of Cylinder Dielectric Barrier Discharge Plasma[J]. Chinese Journal of Light Scattering, 2008, 20(3)
Authors:MA Liu  SHI Jia-ming  YUAN Zhong-cai  ZHANG Wei
Abstract:The emission spectral lines of argon plasma at atmospheric pressure was measured from 350 nm to 1150 nm.It was shown that the spectral range,which is attributed to neutral Ar atoms,is from 680 nm to 950 nm.The electron temperature was measured by the relative intensity ratio based on the spectral lines with the same bottom level,727.29 nm(2P2-1S4),738.40 nm(2P3-1S4) and 751.47 nm(2P51S4).The spectral lines between discharge in Ar and Air were compared and the relation between the relative intensity and the power of source was investigated. It was found that different gas flow and power of source are related to application in industry and spectrum measurement.
Keywords:Dielectric barrier discharge  Plasma  Spectrum diagnosis  Emission spectrum
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