| 高功率激光宽光谱减反膜的溶胶-凝胶旋转法制备工艺 |
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| 引用本文： | 魏芸,吕海兵,蒋晓东,唐灿,任寰,李珂.高功率激光宽光谱减反膜的溶胶-凝胶旋转法制备工艺[J].强激光与粒子束,2003,15(7):647-650. |
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| 作者姓名： | 魏芸 吕海兵 蒋晓东 唐灿 任寰 李珂 |
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| 作者单位： | 中国工程物理研究院 激光聚变研究中心，四川 绵阳 621900 |
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| 基金项目： | 国家自然科学基金重点项目资助课题(2013304)，中国工程物理研究院预研基金资助课题(421020607) |
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| 摘 要： | 采用溶胶-凝胶法用旋转镀膜工艺在K9玻璃基片上制备出了SiO2和有机硅单层减反膜以及有机硅-SiO2双层减反膜。考察了旋转速度对SiO2和有机硅单层膜的中心透射波长、膜层折射率等基本光学性质的影响，实验确定了双层膜的涂敷工艺。透射光谱测量表明，采用本文工艺条件制备的有机硅 SiO2双层膜在430～800nm范围内透射率达99％以上。
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| 关 键 词： | 溶胶-凝胶旋转法 SiO2减反膜 宽光谱减反膜 高功率激光 |
| 文章编号： | 1001-4322(2003)07-0647-04 |
| 收稿时间： | 2002/12/23 |
| 修稿时间： | 2002年12月23 |
Fabrication of broadband antireflective films by sol-gel spin-coating process for high power lasers |
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| wei yun,hai-bing,jiang xiao-dong,tang can,ren huan,li ke.Fabrication of broadband antireflective films by sol-gel spin-coating process for high power lasers[J].High Power Laser and Particle Beams,2003,15(7):647-650. |
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| Authors: | wei yun hai-bing jiang xiao-dong tang can ren huan li ke |
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| Institution: | Research Center of Laser Fusion , CAEP, P.O.Box 919-988, Mianyang 621900, China |
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| Abstract: | The technique to fabricate a double layer broadband antireflective (AR) film by sol gel spin coating process for high power lasers was investigated. The double layer film was composed of a single SiO2 AR coating with reflective index about 13 and silicone coating with reflective index about 1.4. The experimental result showed, when the physical thickness of silicone film and SiO2 AR film were 112nm and 125nm respectively, the double layer AR film can be developed with transmission greater than 99% at the waveband range from 430nm to 800nm, which can meet the optical quality of shield glass for the prototype of Shenguang III facility. |
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| Keywords: | Sol-gel spin coating SiO_2 antireflective film Broadband antireflective film High power lasers |
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