| （Ti,Al）N薄膜光学性能的研究 |
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| 引用本文： | 蒋生蕊 赵学应. （Ti,Al）N薄膜光学性能的研究[J]. 光学学报, 1995, 15(10): 467-1470 |
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| 作者姓名： | 蒋生蕊 赵学应 |
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| 作者单位： | 兰州大学物理系 |
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| 摘 要： | 研究了（Ｔｉ，Ａｌ）薄膜的光学特性，对其反射和透射光谱作了仔细分析。运用Ｈａｄｌｅｙ方程，算出一定成分（Ｔｉ，Ａｌ）Ｎ膜的折射率ｎ，消光系数ｋ随波长的变化关系。又根据透射曲线，计算出了（Ｔｉ，Ａｌ）Ｎ膜的光隙能。
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| 关 键 词： | 薄膜 透射和反射光谱 复折射率 氮薄膜 |
| 收稿时间： | 1994-07-24 |
Study on OPtical Propertics of (Ti, Al)N Films |
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| Jiang Shengrui,Zhao Xueying,Peng Dongliang,Han Zhuan. Study on OPtical Propertics of (Ti, Al)N Films[J]. Acta Optica Sinica, 1995, 15(10): 467-1470 |
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| Authors: | Jiang Shengrui Zhao Xueying Peng Dongliang Han Zhuan |
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| Abstract: | The optical properties of (Ti, Al)N thin film have been studied and the transmission and reflection spectra have been analysed carefully. Using Hadley equations, the optical constants, n-refractive index, k-extinction coefficient of (Ti, Al)N films were determined. According to the transmission spectrum of (Ti, Al)N film, the optical gap energy of (Ti, Al)N film was calculated. |
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| Keywords: | Ti Al) N thin films transmission and reflection spectra complex refractive index. |
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