三种电极的大气压氩等离子体射流光学特性

采用铜片-单匝线圈电极、螺旋缠绕电极和双铜片电极3种结构的放电装置，以氩气作为工作气体，在正弦波激励下获得了大气压等离子体射流。利用电学方法测量了放电电流以及电荷量，并对放电脉冲和放电功率进行了研究；利用发射光谱法对射流的等离子体参量进行了空间分辨测量，并根据ArⅠ 763.5 nm和Ar Ⅰ 772.4 nm的光强计算了电子激发温度。结果发现：在外加电压的正负半周期内，电流脉冲的个数和幅值呈现非对称的变化趋势；随着外加电压的增加，3种结构电极的放电功率从1.7 W逐渐增加到6.0 W；在相同的外加电压情况下，电极面积越小，等离子体射流的长度越长；3种等离子体射流的电子激发温度在1 348.5~3 212.1 K之间，并且随着气体流量的增加，各位置的电子激发温度总体上呈下降趋势，而等离子体的电子密度呈上升趋势。实验结果表明：外加电压对放电功率有一定影响；射流长度与电极面积有关；气体流量对电子激发温度和电子密度的空间分布起重要作用。

Optical Property of The Atmospheric Pressure Argon Plasma Jet Generated by Three Types of Electrodes

The atmospheric argon plasma jet generated by three kinds of electrode configurations was obtained, and the discharge characteristics of the plasma jet were investigated by electrical and optical methods. First, the discharge current and quantity of electric charge were measured by electrical method simultaneously. Meanwhile, the discharge pulse and average discharge power were investigated. The plasma parameters of the plasma jet were studied by spatial resolved optical emission spectroscopy. In addition, the excited electron temperature was estimated by spectral intensity of ArⅠ 763.5 nm and ArⅠ 772.4 nm. It is found that the discharge current pulses are asymmetric at different discharge phases. With the increase of the applied voltage, the discharge powers of the three electrodes are increased from 1.7 W to 6.0 W. At the same applied voltage, the smaller the area of the electrode is, the longer the length of the plasma jet becomes. Besides the above results, we also found that the excited electron temperature decreases from 3 212.1 K to 1 348.5 K with the increase of the gas flow rate, while the electron density of the plasma jet decreases with the gas flow rate. The experimental results show that the applied voltage has some influence on the discharge power and the length of jet is related to the electrode area. The gas flow rate plays an important role in the excited electron temperature and the spatial distribution of electron density.