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Modelling of relief of phase reflection diffraction grating
Affiliation:

a Department of Business Informatics, Kaunas University of Technology, Studentu st. 50, LT-3031/3032, Kaunas, Lithuania

b Institute of Physical Electronics, Kaunas University of Technology, Savanoriu st. 271, LT-3009, Kaunas, Lithuania

c Department of Graphic Communication Engineering, Kaunas University of Technology, Studentu st. 50, LT-3031, Kaunas, Lithuania

Abstract:This article describes theoretical and experimental results on phase reflection diffraction gratings. Based on Fourier optics the mathematical formulation describing diffraction dispersion of light from a relief grating of the trapezium profile is derived. We propose a method that lets us estimate the grating’s geometric parameters in a versatile modelling system. We have designed an original programme that estimates diffraction intensities and calculates diffraction efficiency. The estimated intensities are used to reconstruct the grating’s geometrical properties using our mathematical model. The precision of the method is evaluated as the deviation of obtained results from microscopy data.
Keywords:Diffraction grating   Diffractive optical element   Fourier optics   Levenberg–Marquardt
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