High-frequency micro-inductor fabricated on NiCuZn ferrite substrates |
| |
| Institution: | 1. Center of Excellence for Magnetic Materials, School of Metallurgy and Materials, College of Engineering, University of Tehran, Tehran, Iran;2. Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, Korea;3. Pohang Accelerator Laboratory, Pohang University of Science and Technology (POSTECH), Pohang 790-784, Korea;4. Center for NanoBioEngineering and Spintronics, Department of Materials Science and Engineering, Chungnam National University, Daejeon 305-764, Korea |
| |
| Abstract: | We have fabricated the planar micro-inductors directly on a NiCuZn ferrite substrate. Due to NiCuZn's high resistivity, no insulator is required between the coil and the magnetic film; an advantage in terms of ease fabricated and stray capacitance reduction. Sandwiched inductors show improvement of inductance from 16 to 80 nH at 1 MHz compared with the coreless inductors, and the increment of inductance is larger than the sandwiched thin film inductor. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
