Characteristics of thin film inductors using magnetic multilayered films with ceramic intermediate layers |
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| Affiliation: | 1. Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Lanzhou University, Lanzhou 730000, People’s Republic of China;2. Key Laboratory for Special Function Materials and Structural Design of the Ministry of the Education, Lanzhou University, Lanzhou 730000, People’s Republic of China;1. Department of Physics and Astronomy, The University of Alabama, Tuscaloosa, AL 35401, USA;2. Department of Metallurgical and Materials Engineering, The University of Alabama, Tuscaloosa, AL 35401, USA;3. Materials and Structures Division, NASA Glenn Research Center, Cleveland, OH 44135, USA;3. From the 3Department of Human Molecular Genetics and Biochemistry, Sackler Faculty of Medicine, Tel Aviv University, Tel Aviv, Israel;;4. 4Department of Molecular Pharmacology, Rappaport Faculty of Medicine and Research Institute, Technion, Haifa, Israel;;5. 5Division of Oncology, Rambam Health Care Campus, Haifa, Israel;1. Institute for Theoretical and Applied Electromagnetics RAS, 125412 Moscow, Russia;2. Krasnodar Higher Military School named after General of the Army S.M. Shtemenko, 350035 Krasnodar, Russia;3. Faculty of Physics, Lomonosov Moscow State University, 119991 Moscow, Russia;4. Kuban State Technological University, 350072 Krasnodar, Russia;5. Lappeenranta University of Technology (LUT), 53850 Lappeenranta, Finland |
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| Abstract: | Circular spiral thin film inductors were fabricated using as-deposited magnetic multilayered films with ceramic intermediate layers, and a thin film inductor with a single magnetic layer was also fabricated for comparison. The magnetic multilayered films have good soft magnetic properties and high resistivity thus can decrease the eddy current loss. Employing the magnetic multilayered films, we got a higher quality factor (>30) and better inductor characteristics as compared with the inductor with a single magnetic layer, such as a high operating frequency (>80 MHz) without decreasing the inductance. |
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