High quality factors and room-temperature lasing in a modified single-defect photonic crystal cavity

We propose and analyze a new photonic crystal cavity design that supports a dipole mode with a quality factor greater than 20,000. Such a high quality factor is obtained by precise tuning of the cavity length with minimal disruption of the surrounding photonic crystal. A fabrication procedure based on dry etching of InGaAsP material in HI/H2/Ar is used to demonstrate photonic crystal lasers with smooth and straight sidewalls. These room-temperature lasers concentrate optical energy in air and are suitable for use as tunable lasers and chemical sensors.