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飞秒激光加工铌酸锂晶体:原理与应用
引用本文:Zhou Chao,Ma Jia-Nan,Xu Xiao-Yi,Xu Chuan,Zhang Yong,Zhu Shi-Ning,Xiao Min. 飞秒激光加工铌酸锂晶体:原理与应用[J]. 物理学进展, 2020, 40(3): 69
作者姓名:Zhou Chao  Ma Jia-Nan  Xu Xiao-Yi  Xu Chuan  Zhang Yong  Zhu Shi-Ning  Xiao Min
摘    要:由于具有超短的脉冲宽度和极高的峰值强度,飞秒激光微加工是一种有效的材料加工方法,已广泛应用于光子集成器件的加工。铌酸锂晶体具有优异的电光、非线性光学和压电特性,是集成光学和导波光学中常见的材料。本文综述了飞秒激光对铌酸锂晶体的处理,重点介绍了飞秒激光加工的物理原理及其制备的铌酸锂基光子器件的最新进展。飞秒激光技术使铌酸锂晶体在微纳光子学领域具有广阔的应用前景。

关 键 词:飞秒激光,  铌酸锂,  波导,  非线性光子晶体,  激光加工

Femtosecond laser processing of lithium niobate crystal: principle andapplications
Zhou Chao,Ma Jia-Nan,Xu Xiao-Yi,Xu Chuan,Zhang Yong,Zhu Shi-Ning,Xiao Min. Femtosecond laser processing of lithium niobate crystal: principle andapplications[J]. Progress In Physics, 2020, 40(3): 69
Authors:Zhou Chao  Ma Jia-Nan  Xu Xiao-Yi  Xu Chuan  Zhang Yong  Zhu Shi-Ning  Xiao Min
Abstract:Femtosecond (fs)-laser micromachining is an effective material processing method because of its ultrashort pulse width and extremely high peak intensity. Fs-laser micromachining technology has been widely used to process photonic integrated devices. Lithium niobate (LN) crystal is a common material in integrated and guided-wave optics because of its excellent electro-optic, nonlinear optical, and piezoelectric properties. This review describes fs-laser processing of LN crystal, mainly focusing on the physical principle of fs-laser processing and the recent advances of LN-based photonic devices. Fs-laser technology makes LN crystal a promising platform in the field of micro-nano photonics.
Keywords:femtosecond laser,  lithium niobate,  waveguides,  nonlinear photonic crystals,  laserprocessing
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