Synthesis of thick TiO2 nanotube arrays on transparent substrate by anodization technique

A vertically aligned transparent TiO₂ nanotube array (tTNA) of significantly enhanced tube-length 6.3 ± 0.3 µm was successfully synthesized on glass substrates by anodization technique with ammonium fluoride and ethylene glycol-based electrolyte. Prior to anodization, Ti metal was deposited on glass substrate by facing-target sputtering technique with various sputtering pressures at substrate temperature 420 °C to find out the relation between the structural properties of the Ti layer and the corresponding growth mechanism of the TiO₂ nanotube. The study revealed that structural properties of Ti metal layers and its adhesion to the glass substrate, which can be tuned by deposition parameters, play an important role in the process of tTNA formation.