| 先进光学制造技术进展 |
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| 引用本文： | 许乔, 王健, 马平, 等. 先进光学制造技术进展[J]. 强激光与粒子束, 2013, 25: 3098-3105. doi: 3098 |
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| 作者姓名： | 许乔 王健 马平 陈贤华 雷向阳 |
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| 作者单位： | 1.中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621 900 |
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| 摘 要： | 针对高功率固体激光发展的需求，总结了先进光学制造技术方面的研究进展。采用超精密制造技术提高了非球面等元件的加工精度和制造效率，并为解决低缺陷加工提供了技术途径。围绕面形误差控制，特别是中频波前误差控制，发展了多种确定性抛光技术。针对熔石英元件建立了去除-抑制模型及新的抛光技术，有效抑制了亚表面缺陷的产生。
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| 关 键 词： | 先进光学制造 高功率激光 确定性抛光 表面缺陷 |
| 收稿时间： | 2013-10-10 |
| 修稿时间： | 2013-11-01 |
Progress of advanced optical manufacturing technology |
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| Xu Qiao, Wang Jian, Ma Ping, et al. Progress of advanced optical manufacturing technology[J]. High Power Laser and Particle Beams, 2013, 25: 3098-3105. doi: 3098 |
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| Authors: | Xu Qiao Wang Jian Ma Ping Chen Xianhua Lei Xiangyang |
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| Affiliation: | 1. Research Center of Laser Fusion,CAEP,P.O.Box 918-988,Mianyang 621900,China |
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| Abstract: | The paper summarizes the recent progress of advanced manufacturing technology for the high power laser system in China. The ultra-precision manufacturing technologies, such as ultra-precision grinding, single point diamond fly-cutting and rapid polishing, have been developed for aspheric lens and KDP crystal flats. The preliminary results show the advantages in achieving high accuracy and the ability of yield. Several deterministic finishing technologies have been studied to meet the critical wavefront specifications. A novel removing-mitigating process has been applied to polishing fused silica components to reduce the subsurface defects. |
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| Keywords: | advanced optical manufacturing high power laser deterministic finishing surface defect |
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