Multicrystal X-ray diffraction of heteroepitaxial structures

An appraisal of high-resolution multi-crystal multi-reflection diffractometry (HRMCMRD) and topography is presented to illustrate its potential for structure analysis. Examples of methods for extracting lateral interface roughness, studying layered structures with imperfect epitaxy (including strained layer structures) are given to show the wealth of information available from X-ray techniques. The advantages of diffraction space mapping are discussed in addition to the use of topography to interpret the diffuse and Bragg scattering. The HRMCMRD has a dynamic range of 10⁶ and can record topographs with intensities less than 1 count/s.