| Abstract: | Vacuum molecular pumps have been long known and have several advantages 1–3].Several studies have been devoted to the design of vacuum molecular pumps 7–10]. The methods developed in these studies have been based either on the formulas for gas diffusion in long pipes or on the integral equations of material balance. However, these theories do not permit obtaining design data for real designs of molecular pumps which are close to the experimental data, and, moreover, do not permit solving the practically important problem of optimizing the parameters and geometry of the molecular and turbomolecular pumps with respect to output and compression ratio. The calculations made in 8–10] are valid only for rotor speeds which are much less than the average velocities of the gas molecules. However, the studies in the second direction cannot be continued to a final result in view of the extreme complexity of the solution of the resulting system of integral equations.In the following we describe the calculation of vacuum molecular pumps, based on the Monte-Carlo method (the Monte-Carlo method has been used to calculate the conductance of the elements of vacuum lines in the free molecular regime in 4, 5, 6] and to calculate using the method of sequential approximations the flow of a rarefied gas with account for the collisions between molecules in 11]).We shall apply this method not only to systems with a high vacuum, when the collisions between molecules may be neglected, but also to systems in which in addition to the molecule collisions with the wall it is necessary to consider the possibility of a small number of mutual collisions. |
