Abstract: | Plasma-polymerizations of perfluoromethylcyclohexane (PFMCH)/methane (CH4) mixture were investigated by elemental analysis, infrared spectroscopy, and ESCA; and gas transport characteristics of the plasma-films formed were studied. The addition of CH4 molecules to PFMCH accelerated defluorination to form plasma-polymers poor in fluorocarbon units. The surface energy of the plasma-polymers increased with increasing the CH4 concentration. The oxygen and nitrogen permeation coefficients (PO2 and PN2) and the PO2/PN2 ratio for the polymer films formed from the PFMCH/CH4 mixture depended on the CH4 concentration. The small CH4 addition was effective in improvement of the PO2 value and of the PO2/PN2 ratio, but the much addition was ineffective. The oxygen transport through the plasma-polymers was discussed. |