Static and noise characteristics of nanocomposite gas sensors

Thin film gas sensors based on nanocomposite In₂O₃·Ga₂O₃·SnO₂ (70:20:10) have been manufactured by the high-frequency magnetron sputtering method. The technological cycle of sensor fabrication processes is described. Sensitivity of the prepared sensors at the temperature of working body 250°C and low-frequency noises within the 1–300 Hz range were investigated. The response of sensors to vapors of ethanol and acetone was investigated using resistive and noise methods. It is shown that the value of the sensitivity measured by the noise method exceeds the value of sensitivity measured by the resistive method. Sensors show appreciable sensitivity to the ethanol vapors already at working body temperature 150°C. Sensors can be used for the detection of low concentrations of ethanol vapors. The monotonous increase in the sensitivity of these sensors with increase in the ethanol and acetone vapors content allows applying nanosensors also for fast determination of gases concentration in air.