An electronic aperture for in-depth analysis of solids with an ion microprobe |
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| Affiliation: | 1. IRSTEA, EABX, 50 avenue de Verdun, 336127 Cestas Cedex, France;2. UMR 5554, Institut des Sciences de l''Evolution, Université de Montpellier, CNRS, IRD, EPHE, CC 065. Place E. Bataillon, 34095 Montpellier Cedex 5, France |
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| Abstract: | An electronic aperture for in-depth concentration measurements with an ion microprobe is described. Measurements on polycrystalline metal samples were performed to test the ability of the instrument and its applicability in sputtering yield investigations. On an amorphous target the depth-resolution was found to be satisfactory but still amenable to improvement by a proper choice of primary ion energy and mass. |
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