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Metallorganic Chemical Vapor Deposition of Ru Films Using Cyclopentadienyl‐Propylcyclopentadienylruthenium(II) and Oxygen. |
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| Authors: | Sang Yeol Kang Ha Jin Lim Cheol Seong Hwang Hyeong Joon Kim |
| Abstract: | |
| Keywords: | electric properties, superconductors, semiconductors technology of materials, lasers, semiconductors, superconductors ruthenium, Ru |