Analytical,structural and electrical characterization of SiGe layers by electron microbeam techniques |
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Authors: | Kittler Martin Lärz Jürgen |
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Affiliation: | (1) Institut für Halbleiterphysik Frankfurt/Oder GmbH, Walter-Korsing-Strasse 2, D-15230 Frankfurt/Oder, Federal Republic of Germany |
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Abstract: | k-ratios of Ge-L and Si-K measured at different beam energies allow to evaluate simultaneously composition and thickness of SiGe layers on a Si substrate. A simple technique applying backscattered electrons also enables estimation of composition of bulk SiGe and of composition and thickness of relatively thick ( 200 nm) SiGe layers on Si. Electron channeling patterns of pseudomorphic SiGe/Si structures and of pure Si substrate show no significant differences whereas in relaxed structures a smearing of the pattern with increasing density of misfit dislocations is observed. Under particular conditions the technique of the electron beam induced current permits imaging of recombination-active misfit dislocations with a spatial resolution around 0.2 m. Moreover, a repulsion of holes due to the valence-band offset in a n-Si/SiGe heterostructure was detected. |
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Keywords: | SiGe electron probe microanalysis electron backscattering electron channeling patterns electron beam induced current |
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