140 GHz带状注弯折波导SU-8工艺与传输特性(英)

对140 GHz 带状注弯折波导的色散特性和耦合阻抗进行了仿真。CST微波工作室的仿真表明该波导在140 GHz时，波导内电磁波的轴向相速度为0.227c，且140 GHz频率附近色散特性平坦。波导的耦合阻抗在140 GHz时为5 左右。CST粒子工作室注波互作用的仿真结果表明该弯折波导在140 GHz处的功率增益为24.6 dB。该弯折波导带状电子注的设计保证了该波导的加工工艺与MEMS微加工工艺兼容。通过SU-8 UV-LIGA工艺实现了对该波导的微型加工。测试结果表明该波导的反射损耗S11与插入损耗S21分别为-28 dB和-1.2 dB。实测的输出功率增益达到23 dB。测试结果和仿真结果的一致性表明该弯折波导设计的合理性，同时也验证了多步SU-8 UV-LIGA工艺可以实现对该波导的高精度加工。

Design,fabrication and characterization of a sheet-beam 140 GHz folded waveguide based on multi-step SU-8 UV-LIGA

The dispersion property and interaction impedance of a novel sheet-beam 140 GHz folded waveguide was simulated. By CST Microwave Studio, the phase velocity was 0.227c and the dispersion remained flat when the frequency was 140 GHz. The interaction impedance was about 5 at 140 GHz. The beam-wave interaction simulation by CST Particle Studio showed the output power gain reached 24.6 dB. Sheet-beam design was compatible with MEMS micromachining process. Then the folded waveguide was fabricated by multi-step SU-8 UV-LIGA process. The tested return loss S11 and insertion loss S21 were close to -28 dB and -1.2 dB respectively and the output power gain reached 23 dB. Good accordance between test and simulation results indicates the reasonable design and high machining precision by multi-step SU-8 UV-LIGA.