Dispersion of nanospheres on large glass substrate by amorphous or polycrystalline silicon deposition for localized surface plasmon resonance

Nanosphere lithography is a cost-effective way to fabricate noble metal nanostructures for plasmonics. However, dispersing nanospheres on a large area of glass substrate is a difficulty encountered when transparent substrate is required in applications such as localized surface plasmon resonance or surface enhanced Raman spectroscopy. Because poly(diallyldimethyl ammonium chloride) (PDDA) on silicon surface introduces a force that can disperse nanospheres on silicon, in this article, we modify the glass surface through amorphous or polycrystalline silicon deposition and thus well disperse polystyrene or silica nanospheres over a glass area of more than 2 cm × 2 cm. Transmission loss of the glass substrate caused by amorphous or polycrystalline silicon deposition is analyzed with good agreement to experimental spectra, and localized surface plasmon resonance signals generated from the gold nanostructures fabricated on these substrates are measured and yield a sensitivity of 317 nm/RIU, which prove the feasibility and effectiveness of our method.