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Stress Analysis of ZnO Film with a GaN Buffer Layer on Sapphire Substrate
Authors:CUI Jun-Peng  WANG Xiao-Feng  DUAN Yao  HE Jin-Xiao  ZENG Yi-Ping
Affiliation:[1]Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083; [2]Materials Science Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Abstract:
Keywords:81.15.Hi  61.14.Hg  61.14.Lj
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