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氮化镓基发光二极管产业化中的材料物理问题
引用本文:周均铭,陈弘,贾海强.氮化镓基发光二极管产业化中的材料物理问题[J].物理,2002,31(7):450-452.
作者姓名:周均铭  陈弘  贾海强
作者单位:中国科学院物理研究所表面物理国家重点实验室,北京,100080
基金项目:国家高技术研究发展计划 (课题编号 :2 0 0 2AA311182 )资助项目
摘    要:第三代半导体氮化镓化合物半导体已成为蓝光发光二极管的主流材料,国际上的产业化已成规模,国内也有多家处于中试阶段,由于氮化镓基材料中有如此多的问题没有解决,材料制备设备,器件工艺也极需改进及优化,这既给了中国科研人员及工程技术人员一个机遇,也使他们面临着严峻的挑战。

关 键 词:氮化镓  发光二极管  产业化  材料物理  半导体

MATERIAL PHYSICS PROBLEMS IN THE MASS PRODUCTION OF GaN BASED LED
ZHOU Jun-Ming\ CHEN Hong\ JIA Hai-Qiang.MATERIAL PHYSICS PROBLEMS IN THE MASS PRODUCTION OF GaN BASED LED[J].Physics,2002,31(7):450-452.
Authors:ZHOU Jun-Ming\ CHEN Hong\ JIA Hai-Qiang
Abstract:The GaN based semiconductor, as the third generation of semiconductors, has been the main focus for blue light emitting diodes. Its production abroad has been greatly expanded but has only just started in China. In fact, scientists and engineers have to solve many problems and difficulties related to GaN based materials growth, device structure design and optimization of device processing, including modification of the MOCVD equipment to satisfy the requirements of high quality mass production. This is a great opportunity and challenge to the scientists and engineers in China.
Keywords:gallium nitride  light emitting diode  industrialization  material physics  
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