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THE ION CURRENT BEHAVIOR IN ECR ARGON PLASMA |
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| Authors: | YAO XIN-ZI JIANG DE-YI REN YU-FENG |
| Abstract: | The ion current density as a function of various system parameters, such as pressure, magnetic field, and microwave power, has been studied by using Faraday cup. The bistability of plasma was observed and discussed. |
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