溴甲烷的等离子体发射光谱测量

利用脉冲射频空心阴极等离子体源激发含溴甲烷的工作气体产生等离子体，采用HR4000型高分辨力光谱仪测量了等离子体的发射光谱。通过光谱比较，在等离子体发射光谱图中得到了位于635.07,700.52 nm的溴原子的特征峰,并实验研究了工作气压和溴甲烷密度对溴原子特征峰强度的影响。实验结果表明：在相同的溴甲烷密度下，溴原子的特征峰强度随气压的升高而降低；在相同的气压条件下，溴原子的特征峰强度随溴甲烷密度的升高而升高；溴甲烷密度测量的精度高于1 g/m3。

Plasma emission spectroscopy of methyl bromide

A pulsed radio frequency hollow cathode plasma source was used to excite working gas containing methyl bromide and the plasma emission spectra were measured by HR4000 high-resolution spectrometer. Two characteristic peaks of bromine atom respectively at 635.07 nm and 700.52 nm were observed. The influence of gas pressure and concentration of methyl bromide on the intensity of the two characteristic peaks was investigated. The results show that the intensity the two characteristic peaks decreases with the increasing of gas pressure at the same concentration of methyl bromide, and increases with the increasing of the concentration under the same gas pressure. The accuracy of methyl bromide concentration measurement can be better than 1 g/m³.