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分子束外延材料从基础研究到产业化
引用本文:周均铭,黄绮. 分子束外延材料从基础研究到产业化[J]. 物理, 2000, 29(8): 451-456
作者姓名:周均铭  黄绮
作者单位:中国科学院物理研究所,北京,100080
摘    要:文章计概述了分子束外延技术和材料从实验室走向产业化的成功之路,为读者提供了一个了解高技术发展的全过程:由物理学家从理论上提出人工超晶格量子阱材料;再由器件物理学家制备出若干具有重要应用价值的器件与电路,如微波毫米波高电子迁移率晶体管及电路、量子阱激光器,从而促进了分子束外延技术的发展与完善。移动通信、移动互联肉、地面宽带无结通信、汽车防碰撞雷达、高效太阳能电池等对分子束外延材料的需求为其产业化带来

关 键 词:分子束外延 超晶格 量子阱 产业化 半导体

MOLECULAR BEAM EPITAXIAL MATERIALS FROM FUNDAMENTAL RESEARCH TO PRODUCTION
ZHOU Jun-Ming,HUANG Qi. MOLECULAR BEAM EPITAXIAL MATERIALS FROM FUNDAMENTAL RESEARCH TO PRODUCTION[J]. Physics, 2000, 29(8): 451-456
Authors:ZHOU Jun-Ming  HUANG Qi
Abstract:We describe the successful development of molecular beam epitaxy(MBE) from experiment to production,an excellent example for the understanding of the whole progress of high technology development.Theoretical physicists proposed the superlattice concept and predicted its properties,then experimental physicists prepared different heterojunction structures and superlattices with high electron mobility or unique optical properties,after which device physicists fabricated several important devices and circuits,such as microwave and millimeter wave devices,PHEMTs and quantum well lasers,which further promoted MBE development.The demand of MBE materials in cellular phones and the internet,wide band communication,anti|collision radar for automobiles and high efficiency solar cells have brought great opportunities for MBE production.
Keywords:molecular beam epitaxy   superlattice   quantum well   microwave device   production  
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