Fabrication of solid thin film electrolyte and LiCoO2 by aerosol flame pyrolysis deposition

Aerosol flame pyrolysis deposition method was applied to deposit the oxide glass electrolyte film and LiCoO₂ cathode for thin film type Li-ion secondary battery. The thicknesses of as-deposited porous LiCoO₂ and Li₂O–B₂O₃–P₂O₅ electrolyte film were about 6 μm and 15 μm, respectively. The deposited LiCoO₂ was sintered for 2 min at 700 °C to make partially densified cathode layer, and the deposited Li₂O–P₂O₅–B₂O₃ glass film completely densified by the sintering at 700 °C for 1 h. After solid state sintering process the thicknesses were reduced to approximately 4 μm and 6 μm, respectively. The cathode and electrolyte layers were deposited by continuous deposition process and integrated into a layer by co-sintering. It was demonstrated that Aerosol flame deposition is one of the good candidates for the fabrication of thin film battery.