Simultaneous analysis of low-Z impurities in the near-surface region of solid materials by heavy ion elastic recoil detection (HIERD) |
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| Authors: | S. Grigull R. Behrisch U. Kreissig M. Harz |
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| Affiliation: | (1) Max-Planck-Institut für Plasmaphysik, EURATOM Association, Boltzmannstrasse 2, D-85748 Garching, Germany;(2) Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung, PF 510119, D-01314 Dresden, Germany;(3) Institut für Halbleiter- und Mikrosystemtechnik, TU Dresden, Mommsenstrasse 13, D-01169 Dresden, Germany |
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| Abstract: | A HIERD setup (HI-ERD=heavy ion elastic recoil detection) is introduced including a semiconductor  -E-E telescope for the detection of hydrogen and helium isotopes and a Bragg Ionization Chamber (BIC) for the identification of heavier recoils. An optimum forward scattering geometry with respect to maximum analyzable depth and sensitivity is determined experimentally as well as by calculations for the analysis of oxygen and hydrogen using 35 MeV 35Cl incident ions. As a relevant application of the method, the Na content of borosilicate glass is investigated in samples subject to anodic bonding procedures. |
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