The role of neutron activation analysis in VLSI manufacturing and development |
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Authors: | D. Bouldin |
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Affiliation: | (1) IBM General Technology Division Essex Junction, VT, USA |
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Abstract: | Very large scale integrated (VLSI) semiconductor manufacturing and development require trace analyses for materials inspections, process characterization, contamination control, and failure analysis. Improvement in alternate analytical techniques has reduced the relative importance of neutron activation analysis (NAA) in these activities, but, for certain types of problems, NAA can still play a significant role. |
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