并行共焦显微探测高精度表面坐标信息获取方法

并行共焦显微术能够同时测量多个被测点,大大提高了测量效率,但同时也引入了较大的轴外点像差.已有的数据处理手段不能消除轴外光斑的横向偏移.针对其缺陷,提出了中心扩散法和光强重组法来获取被测光斑的光强位移曲线.实验结果表明,中心扩散法和光强重组法基本消除了轴外点光斑10 μm左右的横向偏移;与现有方法比较,这两种方法还将系统的测量稳定性分别提高了2倍和5倍,满足了并行共焦显微系统高精度快速测量的要求.

Research on High-Precision Acquisitive Method of Surface Coordinate Information Based on Parallel Confocal Microscopy

Parallel confocal microscopy, which can detect lots of measured points simultaneously, can provide better efficiency in measurement, but bring larger off-axis aberration into the system. The horizontal offset of off-axis facula cannot be eliminated by existing data processing method, so centre-proliferation method and optic-intensity restructuring method are brought up to obtain optic-intensity displacement curves. Experimental results show that the method of centre-proliferation and optic-intensity restructuring can remove horizontal offset of about 10 μm of off-axis facula. In contrast to exiting method, the system's stability has been increased by 2 and 5 times by these two kinds of methods, which can fit the high-precision requirement in rapid measurement.