Use of electron irradiation in studying thermal donors in silicon by the EPR method |
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Authors: | L F Makarenko N M Lapchuk Ya I Latushko |
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Institution: | (1) Belarusian State University, 4 F. Skorina Ave., 220050 Minsk, Belarus |
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Abstract: | The bistable thermal donors in Czochralski-grown silicon crystals were investigated by EPR spectroscopy and IR-absorption
techniques. It is shown that using heat treatment at a temperature ≤400°C and appropriate conductivity compensation by irradiation
with 3.5 MeV electrons, one can select from the total signal the EPR-signal associated with only one type, namely TDD2, of
the thermal donors. Based on the model of a two-center core structure of the given complexes, an explanation of the EPR-spectroscopy
data on the oxygen thermal donors in silicon is suggested.
Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 67, No. 2, pp. 188–191, March–April, 2000. |
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Keywords: | crystalline silicon thermal defects EPR spectroscopy |
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