Soft X-ray Holographic Microscopy with Sub-micrometer Resolution

Gabor X-ray in-line holograms are recorded with a photoresist at Hefei National Synchrotron Radiation Laboratory. An Atomic Force Microscope (AFM) is used to read the X-ray holograms of minute granules recorded on photoresist PMMA. Digitized hologram is reconstructed by numerical method. The granules with a size less than 0.3 μm can be resolved in the reconstructed image. So the eatimated resolution reaches the level of suibmicrometer.