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Metrology of electromagnetic static actuation of MEMS microbridge using atomic force microscopy
Institution:1. Wrocław University of Technology, Wybrzeże Wyspiańskiego 27,Wrocław 50-370, Poland;2. ITE Institute of Electron Technology, Al. Lotników 32/46, Warszawa 02-668, Poland;1. Electron Microscopy Center, Empa, Swiss Federal Laboratories for Materials Science and Technology, Überlandstrasse 129, 8600 Dübendorf, Switzerland;2. Laboratory for Multifunctional Materials, Department of Materials, ETH Zürich, Wolfgang-Pauli-Strasse 10, CH-8093 Zürich, Switzerland;3. Laboratory for Mechanics of Materials and Nanostructures, Empa, Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkstr. 39, 3602 Thun, Switzerland;4. Department of Applied Science, Chandigarh Engineering College, Landran, 140307 Mohali, Punjab, India;5. Materials for Energy Conversion, Empa, Swiss Federal Laboratories for Materials Science and Technology, Überlandstrasse 129, 8600 Dübendorf, Switzerland;1. University of Augsburg, Institute for Materials Resource Management, Mechanical Engineering, D-86135, Augsburg, Germany;2. University of Denver, Daniel Felix Ritchie School of Engineering and Computer Science, Denver, CO, 80208, USA;1. Environmental Electron Microscopy Group, Institute of Scientific Instruments of the CAS, Brno, Czech Republic;2. Department of Plant Biology, Faculty of Agronomy, Mendel University in Brno, Brno, Czech Republic
Abstract:The objective of this paper is to describe application of atomic force microscopy (AFM) for characterization and calibration of static deflection of electromagnetically and/or thermally actuated micro-electromechanical (MEMS) bridge. The investigated MEMS structure is formed by a silicon nitride bridge and a thin film metal path enabling electromagnetic and/or thermal deflection actuation. We present how static microbridge deflection can be measured using contact mode AFM technology with resolution of 0.05 nm in the range of up to tens of nm. We also analyze, for very small structure deflections and under defined and controlled load force varied in the range up to ca. 32 nN, properties of thermal and electromagnetical microbridge deflection actuation schemes.
Keywords:Atomic force microscopy (AFM)  Microbridge  Electromagnetic actuation  Thermal actuation  Lorentz force
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