| 菲涅耳区衍射光学束匀滑器件的设计 |
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| 引用本文： | 谭峭峰,严瑛白,金国藩,邬敏贤,徐端颐. 菲涅耳区衍射光学束匀滑器件的设计[J]. 强激光与粒子束, 2003, 15(2): 125-128 |
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| 作者姓名： | 谭峭峰 严瑛白 金国藩 邬敏贤 徐端颐 |
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| 作者单位： | 清华大学 精密测试技术与仪器国家重点实验室, 北京 100084 |
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| 基金项目： | 国家 8 63计划项目资助课题，中国博士后科学基金资助课题，国家自然科学基金委员会 中国工程物理研究院联合基金资助课题 (1 0 2 760 2 1 ) |
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| 摘 要： | 采用精细化设计方法，进行了菲涅耳区衍射光学束匀滑器件的设计，利用爬山-模拟退火混合优化算法，获得了真实的束匀滑分布，不仅控制了算法采样点上的光强分布，还控制了其他非采样点上的光强分布。优化得到的束匀滑器件的位相深度小于π，易于后续加工。
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| 关 键 词： | 菲涅耳区 衍射光学器件 束匀滑 精细化设计 |
| 文章编号： | 1001-4322(2003)02-0125-04 |
| 收稿时间： | 2002-04-25 |
| 修稿时间： | 2002-04-25 |
Design of diffractive optical element for beam smoothing in Fresnel diffraction region |
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| TAN Qiao-feng,YAN Ying-bai,JIN Guo-fan,WU Min-xian,XU Duan-yi. Design of diffractive optical element for beam smoothing in Fresnel diffraction region[J]. High Power Laser and Particle Beams, 2003, 15(2): 125-128 |
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| Authors: | TAN Qiao-feng YAN Ying-bai JIN Guo-fan WU Min-xian XU Duan-yi |
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| Affiliation: | State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China |
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| Abstract: | In this paper, the precise design of the diffractive optical element (DOE) is completed for beam smoothing in Fresnel diffraction region. By using the hybrid algorithm, merging Hill-climbing with Simulated Annealing, true beam smoothing has been obtained, the intensity distribution of any point, besides the used sampling point in the optimization, on the output plane is consistent with the demand for beam smoothing. The phase depth of the designed DOE is smaller than π, which is very beneficial for the follow-up fabrication. |
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| Keywords: | Fresnel diffraction region Diffractive optical element Beam smoothing Precise design |
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