Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing |
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| Institution: | 1.Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China;2.Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China;3.The Australian National University, Canberra, ACT 2600, Australia |
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| Abstract: | Chalcogenide glasses have shown promise in fabricating mid infrared(MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low,making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions. |
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| Keywords: | chalcogenide glasses hot embossing rib waveguides MIR sensing |
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