| 氯参与的化学气相淀积金刚石的热力学分析 |
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| 引用本文： | 刘志杰,张卫,张剑云,万永中,王季陶,曹传宝,朱鹤孙. 氯参与的化学气相淀积金刚石的热力学分析[J]. 高等学校化学学报, 1999, 20(1): 111 |
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| 作者姓名： | 刘志杰 张卫 张剑云 万永中 王季陶 曹传宝 朱鹤孙 |
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| 作者单位： | 1. 复旦大学电子工程系CVD研究室, 上海 200433;2. 北京理工大学材料科学研究室, 北京 100081 |
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| 基金项目： | 国家自然科学基金,“八六三”高科技基金 |
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| 摘 要： | 用非平衡热力学耦合模型研究了金刚石在CHCl体系中的生长,计算所得CHCl体系的金刚石生长的相图与大量实验结果符合良好.通过热力学分析讨论了氯的添加对提高金刚石薄膜生长速率及其质量的影响以及降低淀积温度的作用.
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| 关 键 词： | 氯 金刚石 化学气相淀积 热力学 |
| 收稿时间： | 1998-01-15 |
Thermodynamic Analysis for Chemical Vapor Deposition Diamond with the Participation of Chlorine |
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| LIU Zhi-Jie,ZHANG Wei,ZHANG Jian-Yun,WAN Yong-Zhong,WANG Ji-Tao,CAO Chuan-Bao,ZHU He-Sun. Thermodynamic Analysis for Chemical Vapor Deposition Diamond with the Participation of Chlorine[J]. Chemical Research In Chinese Universities, 1999, 20(1): 111 |
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| Authors: | LIU Zhi-Jie ZHANG Wei ZHANG Jian-Yun WAN Yong-Zhong WANG Ji-Tao CAO Chuan-Bao ZHU He-Sun |
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| Affiliation: | 1. Department of Electronic Engineering, CVD Laboratory, Fudan University, Shanghai, 200433;2. Material Science Laboratory, Beijing University of Science and Technology, Beijing, 100081 |
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| Abstract: | Diamond growth condition for C2H2Cl system is studied by using The non-equilibrium Thermodynamic coupling model.The pHase diagram for diamond growt h is calculated, which is in good agreement with many reported experiments.The experimental observation that diamond film may grow at a higher rate under low temperature and have better qualities due to The addition of chlorine is also discussed according to The Thermodynamic analysis. |
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| Keywords: | Chlorine Diamond Chemical vapor deposition Thermodynamics |
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