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Some aspects of plasma polymerization investigated by pulsed R.F. discharge
Authors:H Yasuda  T Hsu
Abstract:The polymerization of organic compounds in glow discharge (plasma polymerization) was investigated by using pulsed R.F. discharge (100 μsec on, 900 μsec off). The effects of pulsed discharge on polymer deposition rate, pressure change in plasma, ESR signals of free spins in both plasma polymer and substrate, and the contact angle of water on the plasma polymer surface were investigated for various organic compounds. The results are correlated to the mechanisms of polymer formation in plasma (plasma polymerization) which has been postulated as repeating processes of stepwise (propagation) reactions. The effect of the pulse is different from one group of organic compounds to another depending on whether or not they contain an olefinic double bond and/or a triple bond. The main difference seems to be the addition polymerization which can occur exclusively during the off-period of pulsed discharge. Ultraviolet emission from pulsed discharge is much less than from continuous discharge. Consequently, the fragmentation of the monomer and the free-radical formation in the substrate are less with the pulsed discharge. Properties of polymers from some organic compounds formed in continuous and in pulsed discharge were found to be significantly different, and the differences were postulated from the changes of polymerization mechanisms in the pulsed discharge.
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