| 单室沉积高效非晶硅/微晶硅叠层太阳电池的研究 |
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| 引用本文： | 张晓丹,郑新霞,王光红,许盛之,岳强,林泉,魏长春,孙建,张德坤,熊绍珍,耿新华,赵颖. 单室沉积高效非晶硅/微晶硅叠层太阳电池的研究[J]. 物理学报, 2010, 59(11): 8231-8236 |
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| 作者姓名： | 张晓丹 郑新霞 王光红 许盛之 岳强 林泉 魏长春 孙建 张德坤 熊绍珍 耿新华 赵颖 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室 天津,300071 |
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| 基金项目： | 国家高技术研究发展计划(批准号:2007AA05Z436, 2009AA050602),天津科技支撑项目(批准号:08ZCKFGX03500),国家重点基础研究发展计划 (批准号:2006CB202602,2006CB202603),国家自然科学基金(批准号:60976051),科技部国际合作重点项目(批准号:2006DFA62390,2009DFA62580)和教育部新世纪人才(批准号:NCET-08-0295)资助的课题. |
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| 摘 要： | 采用甚高频等离子体增强化学气相沉积技术,在前期单室沉积的微晶硅薄膜太阳电池和非晶硅/微晶硅叠层太阳电池研究的基础上,通过对微晶硅底电池本征层硅烷浓度的优化,获得了初始效率达到11.02%(电池面积1.0 cm2)的非晶硅/微晶硅叠层太阳电池.同时,100 cm2的非晶硅/微晶硅叠层太阳电池的组件效率也达到了9.04%.关键词：非晶硅/微晶硅叠层电池单室甚高频
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| 关 键 词： | 非晶硅/微晶硅叠层电池 单室 甚高频 |
| 收稿时间： | 2009-12-29 |
| 修稿时间： | 2010-02-02 |
High efficiency amorphous/microcrystalline silicon tandem solar cells deposited in a single chamber system |
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| Zhang Xiao-Dan,Zheng Xin-Xia,Wang Guang-Hong,Xu Sheng-Zhi,Yue Qiang,Lin Quan,Wei Chang-Chun,Sun Jian,Zhang De-Kun,Xiong Shao-Zhen,Geng Xin-Hua,Zhao Ying. High efficiency amorphous/microcrystalline silicon tandem solar cells deposited in a single chamber system[J]. Acta Physica Sinica, 2010, 59(11): 8231-8236 |
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| Authors: | Zhang Xiao-Dan Zheng Xin-Xia Wang Guang-Hong Xu Sheng-Zhi Yue Qiang Lin Quan Wei Chang-Chun Sun Jian Zhang De-Kun Xiong Shao-Zhen Geng Xin-Hua Zhao Ying |
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| Affiliation: | Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China;Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China |
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| Abstract: | Based on the previous research on the deposition of amorphous/microcrystalline (micromorph) silicon tandem solar cells, silane concentration for the deposition of microcrystalline bottom cell is selected to further optimize the performance for micromorph tandem solar cells by using very high frequency technique. Finally, micromorph silicon tandem solar cell with 11.02% (Area=1.0cm2) initial conversion efficiency is fabricated at a certain silane concentration, and it has a structure suitable for trapping light. Furthermore, 100cm2 micromorph module with 9.04% initial conversion efficiency is also successfully obtained. |
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| Keywords: | amorphous/microcrystalline silicon tandem solar cells single chamber very high frequency |
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