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同时实现多角度非垂轴面均匀照明的衍射光学器件
引用本文:谭峭峰,严瑛白,金国藩,邬敏贤.同时实现多角度非垂轴面均匀照明的衍射光学器件[J].光子学报,2000,29(5):431-435.
作者姓名:谭峭峰  严瑛白  金国藩  邬敏贤
作者单位:清华大学精密测试技术及仪器国家重点实验室,北京,100084
基金项目:国家科技攻关项目,中国科学院资助项目,,,,
摘    要:本文利用长焦深器件设计思路,提出了通过设计衍射光学器件相位分布使得在三个垂轴面上满足均匀照明要求来间接实现非垂轴面均匀照明的设计方法,并完成了同时实现多种角度非垂轴面均匀照明的衍射光学器件设计.基于爬山法和模拟退火法相结合的混合算法,设计了器件的相位分布,在30°、45°、55°非垂轴面上光斑不均匀性分别为5.91%、4.00%、3.38%.该方法可推广至二维情形,实现任意曲面均匀照明的要求.

关 键 词:非垂轴面均匀照明  长焦深  衍射光学器件
收稿时间:1999-01-25
修稿时间:1999-01-25

DIFFRACTIVE OPTICAL ELEMENTS TO REALIZE UNIFORM ILLUMINATION IN INCLINED PLANES AT DIFFERENT ANGLES WITH THE OPTICAL AXIS SIMULTANEOUSLY
Tan Qiaofeng,Yan Yingbai,Jin Guofan,Wu Minxian.DIFFRACTIVE OPTICAL ELEMENTS TO REALIZE UNIFORM ILLUMINATION IN INCLINED PLANES AT DIFFERENT ANGLES WITH THE OPTICAL AXIS SIMULTANEOUSLY[J].Acta Photonica Sinica,2000,29(5):431-435.
Authors:Tan Qiaofeng  Yan Yingbai  Jin Guofan  Wu Minxian
Institution:State Key Laboratory of Precision Measurement Technology and Instruments Tsinghua University, Beijing, China 100084
Abstract:In this paper,applying the method to design element with long focal depth,an indirect design principle is prospected to realize uniform illumination in inclined plane at an angle with the optical axis,by designing Diffractive Optical Elements’ phase distribution to make uniform illumination in three planes at right angles with the optical axis.Diffractive Optical Elements for realizing uniform illumination in inclined planes at different angles with the optical axis simultaneously are completed.Hybrid algorithm based on hill-climbing and simulated annealing is utilized for phase design.Simulated results show the non uniformities in inclined planes at angles of 30°,45°,55° with the optical axis are 5.91%,4.00%,3.33%,respectively.Generalizing the use of such a method,uniform illumination in any shape surface can be realized.
Keywords:Uniform illumination in inclined plane  Long focal depth  Diffractive optical element
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