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The thickness dependence of the crystallization behavior in sandwiched amorphous Ge2Sb2Te5 thin films
Authors:G. BaiR. Li  H.N. XuY.D. Xia  Z.G. Liu  H.M. LuJ. Yin
Affiliation:a Department of Materials Science and Engineering and National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, PR China
b Department of Physics and National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, PR China
Abstract:The thickness dependent crystallization behavior of thin amorphous Ge2Sb2Te5(GST) films sandwiched between different cladding materials has been investigated based on a thermodynamic model. It is revealed that there is a critical thickness below which the crystallization cannot occur. The critical thickness is determined by the energy difference Δγ between the crystalline GST/substrate interface energy and the amorphous GST/substrate interface energy, the melting enthalpy, and the mole volume. The calculated result is in good agreement with the experiments. Furthermore, the crystallization temperature is also affected by interface energy difference Δγ. Larger Δγ gives rise to a higher crystallization temperature, and vice versa. This impact becomes stronger as the film thickness is decreased.
Keywords:Phase change   Thin films   Crystallization   Thickness dependence   Thermodynamic
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