The properties of B-Sb thin films prepared by molecular flow region PVD process期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

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The properties of B-Sb thin films prepared by molecular flow region PVD process

Authors:	Y Kumashiro K Nakamura M Ohtsuka M Nakano

Institution:	^a Graduate School of Faculty of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodagaya-ku, Yokohama 240-8501, Japan ^b College of Humanities and Sciences, Nihon University, 3-25-40 Sakurajousui, Setagaya, Tokyo 156-0045, Japan

Abstract:

Keywords:	B₁₂Sb₂ film Molecular flow region PVD process van der Pauw method Electrical conductivity Thermal diffusivity Thermoelectric power Thermoelectric figure-of-merit
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