A comparison of silicon oxide and nitride as host matrices on the photoluminescence from Er+ ions |
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Authors: | Ding Wu-Chang Liu Yan Zhang Yun Guo Jian-Chuan Zuo Yu-Hu Cheng Bu-Wen Yu Jin-Zhong and Wang Qi-Ming |
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Institution: | State Key Laboratory on Integrated Optoelectronics,
Institute of Semiconductors,
Chinese Academy of Sciences, Beijing
100083,
China |
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Abstract: | This paper compares the properties of silicon oxide and nitride as
host matrices for Er ions. Erbium-doped silicon nitride films were
deposited by a plasma-enhanced chemical-vapour deposition system.
After deposition, the films were implanted with Er$^{3+}$ at
different doses. Er-doped thermal grown silicon oxide films were
prepared at the same time as references. Photoluminescence features
of Er$^{3+}$ were inspected systematically. It is found that silicon
nitride films are suitable for high concentration doping and the
thermal quenching effect is not severe. However, a very high annealing
temperature up to 1200~${^\circ}$C is needed to optically activate
Er$^{3+}$, which may be the main obstacle to impede the application
of Er-doped silicon nitride. |
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Keywords: | Er doping silicon nitride photoluminescence |
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