| Induced Nucleation of Diamond Films on ZnS Substrates Precoated with Ceramic Interlayer |
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| 作者姓名： | 高旭辉 吕反修 佟玉梅 郭会斌 唐伟忠 李成明 陈广超 余怀之 程宏范 杨海 |
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| 作者单位： | [1]SchoolofMaterialsScienceandEngineering,UniversityofScienceandTechnologyBeijing,Beijing100083 [2]GeneralResearchInstituteforNonferrousMetals,Beijing100088 |
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| 摘 要： | We attempt to coat a multi-spectrum chemical-vapour-deposition ZnS substrate with smooth crystalline diamond films on the top of properly designed ceramic interlayer,which provides protection for ZnS against corrosion by the H2-CH4 microwave plasma and mitigates the thermal expansion coefficient mismatching between diamond and ZnS.However,difficulties in the homogeneous diamond nucleation on a ceramic interlayer were encountered.It was found that high rate nucleation of diamond could be induced by a metal or semiconductor mask placed on the top of ZnS.
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| 关 键 词： | 硫化锌 金刚石薄膜 成核现象 基片 陶瓷夹层 半导体覆盖 |
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