Development of Numerical Model for Radio Frequency Atmospheric Pressure Glow Discharges in Argon |
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Authors: | FU Ping QIAN Yu-jun SONG Shu-tong DING Ke SHI Jian-jun |
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Institution: | 1. College of Science, Donghua University, Shanghai201620, China 2. College of Science, Donghua University, Shanghai201620, China ;Member of Magnetic Confinement Fusion Research Center, Ministry of Education, Donghua University, Shanghai 201620, China 3. College of Science, Donghua University, Shanghai201620, China ;Member of Magnetic Confinement Fusion Research Center, Ministry of Education, Donghua University, Shanghai 201620, China ;State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Material Science and Engineering, Donghua University, Shanghai 201620, China |
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Abstract: | A one-dimensional,self-consistent fluid model is developed for a computational investigation on discharge characteristics and dynamics of radio frequency (RF) glow discharges in atmospheric argon,which are demonstrated through the spatial and temporal profiles of plasma species,electric field,and mean electron energy.Furthermore,in the discharge current density range from 7.1 mA/ cm2 to 119.5 mA/cm2,different discharge operation modes of α and γ are indicated by changing differential conductivity of voltagecurrent characteristics and sheath dynamics in terms of sheath voltage and sheath thickness. |
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Keywords: | atmospheric pressure glow discharge( APGD ) numerical simulation mode transition sheath dynamics |
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