一种提高HWS采样率的透镜式微扫描方法 |
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引用本文: | 马辰昊,付跃刚. 一种提高HWS采样率的透镜式微扫描方法[J]. 应用光学, 2015, 36(5): 768-773. DOI: 10.5768/JAO201536.0503001 |
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作者姓名: | 马辰昊 付跃刚 |
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作者单位: | 1.长春理工大学 光电工程学院,吉林 长春 130022 |
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基金项目: | 国家自然科学基金(61108044) |
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摘 要: | 为改善传统哈特曼-夏克波前传感器对待测波前采样不足的缺点,对哈特曼-夏克波前传感器和微扫描进行了分析,提出一种提高哈特曼-夏克波前传感器采样率的透镜式微扫描方法。通过在微透镜阵列之前加入由PZT驱动的透镜扫描装置,对CCD采集的光斑分布情况进行高分辨率微扫描图像重建,通过对重建后的光斑分布进行波前重构,提高了哈特曼波前传感器对待测波前的采样率。通过对比实验验证,波前复原精度提高了41%,可以有效提高哈特曼传感器对波前探测的精度。
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关 键 词: | 应用光电子学 哈特曼-夏克波前传感器 透镜式微扫描 PZT驱动 |
Method for increasing HWS sampling rate on lens micro-scanning |
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Affiliation: | 1.School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,China |
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Abstract: | In order to improve the shortcoming of insufficient sampling of measured wavefront in traditional Hartmann-Shack wavefront sensor(HWS), the Hartmann Shack wavefront sensor and micro-scanning technology were analyzed, at the same time, the method of lens micro-scanning by raising the sampling rate in Hartmann-Shack wavefront sensor was proposed . The lens scanning device driven by PbZrTiO3 (PZT) was added before the microlens array,and the high resolution micro-scanning image was reconstructed for the spot distribution collected by the charge coupled device (CCD) . After the wavefront reconstruction of the rebuilt spot distribution, the sampling rate of measured wavefront was improved in Hartmann-Shack wavefront sensor. Comparison experiments verify that the method can raise the recovered accuracy of wavefront by 41%, and it can effectively increase the accuracy of wavefront detection in Hartmann-Shack wavefront sensor. |
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