Antireflective properties of porous Si nanocolumnar structures with graded refractive index layers |
| |
Authors: | Jang Sung Jun Song Young Min Yu Jae Su Yeo Chan Il Lee Yong Tak |
| |
Affiliation: | School of Information and Communications, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, South Korea. |
| |
Abstract: | We report on the antireflective characteristics of porous silicon (Si) nanocolumnar structures consisting of graded refractive index layers and carry out a rigorous coupled-wave analysis simulation. The refractive index of Si is gradually modified by a tilted angle electron beam evaporation method. For the fabricated Si nanostructure with a Gaussian index profile of 100 nm, reflectivity (R) of less than 7.5% is obtained with an average value of approximately 2.9% at the wavelength region of 400-800 nm. The experimental results are reasonably consistent with the simulated results for the design of antireflective Si nanostructures. |
| |
Keywords: | |
本文献已被 PubMed 等数据库收录! |
|