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Position magnifying sensor |
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| Authors: | K Matsuda T H Barnes B F Oreb and C J R Sheppard |
| Institution: | a Department of Physical Optics, School of Physics, University of Sydney, Sydney, NSW 2006, Australia b Research Fellow, Japan Science and Technology, Kawaguchi Centre Building, 4-1-8 Honchyo, Kawaguchi-shi, Saitama-ken, Japan c Department of Physics, University of Auckland, Private Bag 92019, Auckland, New Zealand d CSIRO Telecommunications and Industrial Physics, Bradfield Road, West Lindfield, NSW 2070, Australia |
| Abstract: | This paper describes the application of multiple beam shearing interferometry to a position magnifying sensor. A multiple beam shearing interferometer (MBSI) with a shear plate wedged in the vertical direction produces sharp multiple beam fringes. When the lateral displacement of a point source (which gives rise to the input beam of the MBSI) or its image occurs in the horizontal direction, these fringes move vertically in a magnified manner. This characteristic was used in a position magnifying sensor to detect the displacement of a point image. The advantages of the sensor include a large displacement magnification (more than a hundred times) and a large working distance. |
| Keywords: | Position magnifying sensor Multiple beam shearing interferometry Position sensor Shearing interferometry Plane parallel plate Shear plate |
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