| SrRuO3导电层对快速退火制备Pb(Zr,Ti)O3薄膜结构和性能的影响 |
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| 引用本文： | 王宽冒,刘保亭,倪志宏,赵敬伟,李丽,李曼,周阳. SrRuO3导电层对快速退火制备Pb(Zr,Ti)O3薄膜结构和性能的影响[J]. 人工晶体学报, 2010, 39(3): 608-612 |
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| 作者姓名： | 王宽冒 刘保亭 倪志宏 赵敬伟 李丽 李曼 周阳 |
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| 作者单位： | 河北大学物理科学与技术学院,保定,071002;河北大学计算中心,保定,071002 |
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| 基金项目： | 国家自然科学基金，河北省自然科学基金项目，教育部科学技术研究重点项目，河北省应用基础研究计划重点基础研究项目 |
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| 摘 要： | 采用溶胶-凝胶法在Pt/Ti/SiO2/Si基片上,制备了Pt/Pb(Zr,Ti)O3(PZT)/Pt和SrRuO3(SRO)/PZT/SrRuO3(SRO)异质结电容器,并研究了快速退火条件下SRO导电层对PZT结构和性能的影响.XRD测试表明,两种结构电容器中的PZT薄膜均为钙钛矿结构,SRO/PZT/SRO、Pt/PZT/Pt均具有较好的铁电性和脉宽依赖性,5 V电压下两电容器的剩余极化强度Pr和矫顽电压Vc分别为28.3 μC/cm2、1.2 V和17.4 μC/cm2、2.1 V.在经过1010次翻转后,SRO/PZT/SRO铁电电容器疲劳特性相对于Pt/PZT/Pt电容器有了较大的改善,但SRO导电层的引入也带来了漏电流增大的问题.
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| 关 键 词： | 钌酸锶 锆钛酸铅 快速退火, |
Effect of SrRuO_3 Conductive Layer on the Structure and Properties of Pb(Zr,Ti)O_3 Thin Films Prepared by Rapid Thermal Annealing |
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| WANG Kuan-mao,LIU Bao-ting,NI Zhi-hong,ZHAO Jing-wei,LI Li,LI Man,ZHOU Yang. Effect of SrRuO_3 Conductive Layer on the Structure and Properties of Pb(Zr,Ti)O_3 Thin Films Prepared by Rapid Thermal Annealing[J]. Journal of Synthetic Crystals, 2010, 39(3): 608-612 |
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| Authors: | WANG Kuan-mao LIU Bao-ting NI Zhi-hong ZHAO Jing-wei LI Li LI Man ZHOU Yang |
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| Affiliation: | WANG Kuan-mao1,LIU Bao-ting1,NI Zhi-hong2,ZHAO Jing-wei1,LI Li1,LI Man1,ZHOU Yang1(1.College of Physics Science , Technology,Hebei University,Baoding 071002,China,2.Center of Computer Science,China) |
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| Abstract: | Ferroelectric Pb(Zr,Ti)O3 (PZT) heterostructures were fabricated on Pt/Ti/SiO2/Si substrates by Sol-gel method with or without SrRuO3(SRO) conductive layer.Influences of SRO conductive layer prepared by rapid thermal annealing on the structure and physical properties of PZT films were studied by X-ray diffraction (XRD) and ferroelectric tester (Precision LC unit).X-ray diffractions show that the PZT thin films with or without SRO conductive layer are perovskite structure.Pr and Vc of SRO/PZT/SRO and Pt/PZT/... |
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| Keywords: | SrRuO3 Pb(Zr Ti)O_3 rapid thermal annealing |
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