Superlattices and composition of phases of CVD layers based on TiCx,VCx, (Ti,V)Cx,and (Cr,Fe)7C3

Protective layers of TiC_x, VC_x, (Ti, V)C_x, and (Cr, Fe)₇C₃ on C100W1 tool steel have been investigated by X-Ray and electron diffraction. Superlattices have been observed in the VC_x− and (Cr, Fe)₇C₃−layers. As manufacturing of (Ti, V)C_x−layers the growth of carbides with low content of V and Ti respectively has been prefered.