氮化硅陶瓷球研磨过程中磨损形式的研究

为掌握不同研磨条件下氮化硅(Si3N4)陶瓷球表面的磨损形式,在球-盘式磨损实验装置上,采用不同载荷及磨料粒度和浓度的碳化硼(B4C)磨料进行了磨损实验.通过显微镜观察陶瓷球表面确定其磨损形式,并绘制了磨损形式与载荷及磨料浓度的关系图.研究发现磨损形式与磨粒粒径关系不大;载荷较大或磨粒浓度较低时氮化硅陶瓷球表面发生二体磨损,反之则产生三体磨损.建立了磨损"接触刚度"理论公式,计算确定了实验条件下氮化硅陶瓷球磨损形式的转换点数值为20."接触刚度"小于20时,氮化硅陶瓷球表面发生二体磨损,反之则产生三体磨损.由此可预测不同研磨条件下氮化硅陶瓷球的磨损形式.

Wear Mode of Silicon Nitride Balls in Lapping Process

To investigate the wear mode of the silicon nitride balls in lapping process,a series of abrasion tests were carried out on a ball-plate wear test apparatus with different loads,abrasive girt diameter,and slurry concentrations.The abraded ball surface was observed by optical microscope to indentify the wear mode,and a wear map,which shows the effect of load and concentration of abrasive on the wear mode under different grit size,was drawed.The grit size has little effect on the wear mode,and the wear mode c...